Bidirectional Electrothermal Actuator With Z-Shaped Beams
نویسندگان
چکیده
منابع مشابه
An electrothermal microactuator with Z-shaped beams
This paper introduces a Z-shaped thermal microactuator for in-plane motion, which could be complementary to the well-established comb drives and V-shaped thermal actuators. The Z-shaped actuators share many features in common with the V-shaped ones, but offer certain advantages such as smaller feature size and larger displacement. They also offer a large range of stiffness and output force that...
متن کاملCannes-Mandelieu, 5-7 May 2003 PARALLEL-BEAMS/LEVER ELECTROTHERMAL OUT-OF-PLANE ACTUATOR
We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...
متن کاملParallel-beamslever Electrothermal Out-of-plane Actuator
We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combiniig numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کاملShaped nondiffracting beams.
We demonstrate that nondiffracting beams can be generated with an arbitrary transverse shape. In particular, we show that the azimuthal complex modulation of the angular spectra of Helmholtz-Gauss wave fields constitutes a degree of freedom sufficient to tailor nondiffracting beams with an intensity pattern of choice.
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEE Sensors Journal
سال: 2012
ISSN: 1530-437X,1558-1748
DOI: 10.1109/jsen.2012.2194141